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Destruction of hazardous gases by electromagnetic isochoric plasma heating.

Development and exploitation of technology based on electro-
magnetic isochoric plasma heating. As a first application
a reactor for combined scrubbing/pumping of hazardous gases
used in the microelectronics industry will be developed.

The project concerns the development and exploitation of novel reactor technology based on electromagnetic isochoric plasma heating (EPA). This EPA technology creates a plasma with a particularly high degree of localization which in turn can be used for a very efficient reactor. A first application is a reactor for the destruction and pumping of hazardous gases used in the microelectronics industry. The project will involve some further development, optimization, prototype building and scaling up of the technology for final production.
Acronym: 
DEPLASMA
Project ID: 
1 207
Start date: 
01-06-1997
Project Duration: 
54months
Project costs: 
500 000.00€
Technological Area: 
Market Area: 

Raising the productivity and competitiveness of European businesses through technology. Boosting national economies on the international market, and strengthening the basis for sustainable prosperity and employment.