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High power excimer lasers

Design of excimer laser test facilities to investigate
reliability of components for multi-kilowatt industrial
excimer laser. Create european network of component and
system subcontractors.

SIEMENS AG, LAMBDA PHYSIK GMBH, PERMANOVA, LASERDOT, EXITECH LTD, SOPRA and OXFORD LASERS have decided to join their efforts in order to carry out a long-term project of research in high power excimer laser technology. The target products are industrial excimer lasers in the average power range of one kilowatt or more. The industrial laser strategy of the project calls for the following lines of action: 1. Immediate start on the design of excimer laser test facilities in order to investigate components with respect to their reliability for a multi-kilowatt industrial excimerlaser. 2. Creation of industrial workshops and application laboratories in order to promote quick and open dissemination of results in the ultraviolet (UV) material processing field. 3. Creation of a European network of component and system subcontractors of high technological qualification in order to improve the competitivity of future products and favour the integration of the lasers in complete machine centres.
Acronym: 
EXCIMER
Project ID: 
205
Start date: 
01-10-1987
Project Duration: 
109months
Project costs: 
52 800 000.00€
Technological Area: 
Market Area: 

Raising the productivity and competitiveness of European businesses through technology. Boosting national economies on the international market, and strengthening the basis for sustainable prosperity and employment.