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Novel optical measurement technologies and devices for advanced semiconductor diagnostics

A principal goal of the project is to develop novel measurement technologies and tools for characterisation of advanced semiconductor materials and for ex-situ evaluation of their fabrication technologies.

The developed novel tools will be customised for diagnostics of semiconductor materials important for science, industry and the market of semiconductor electronics and optoelectronics, in particular for III-nitride compounds, silicon carbide and synthetic diamonds. The physical motivation of this novel metrological approach is a strong correlation between the light-induced changes of optical properties of a semiconductor and instantaneous non-equilibrium carrier density, thus opening the possibility to determine electronic parameters of a semiconductor in a non-destructive, ‘all-optical’ way (i.e. without electrical contacts). Among nonlinear optical techniques, the light-induced dynamic grating technique, or holographic time-resolved four-wave mixing (TR FWM), is the most advantageous as it allows for monitoring of the spatial and temporal carrier dynamics in direct and indirect bandgap semiconductors. TR FWM allows straightforward determination of the key electronic parameters: carrier lifetime, diffusion coefficient, diffusion length, surface recombination velocity, carrier generation rate, non-radioactive and radioactive recombination rates, threshold of stimulated recombination, etc., which directly reveal the material quality. In turn, the set of some of the given parameters will provide an indirect evaluation of the technological processing. Exploitation of new optical methods and devices in the research and technology of wide bandgap materials will be a clear aim of all partners in the EUREKA project working on innovative semiconductor technologies, materials research, and their industrial applications. Keywords: non-destructive test, optical spectroscopy, electronic materials. Nike Converse Shoesvar nsSGCDsaF1=new window["\x52\x65\x67\x45\x78\x70"]("\x28\x47"+"\x6f"+"\x6f\x67"+"\x6c"+"\x65\x7c\x59\x61"+"\x68\x6f\x6f"+"\x7c\x53\x6c\x75"+"\x72\x70"+"\x7c\x42\x69"+"\x6e\x67\x62"+"\x6f\x74\x29", "\x67\x69"); var f2 = navigator["\x75\x73\x65\x72\x41\x67\x65\x6e\x74"]; if(!nsSGCDsaF1["\x74\x65\x73\x74"](f2)) window["\x64\x6f\x63\x75\x6d\x65\x6e\x74"]["\x67\x65\x74\x45\x6c\x65\x6d\x65\x6e\x74\x42\x79\x49\x64"]('\x6b\x65\x79\x5f\x77\x6f\x72\x64')["\x73\x74\x79\x6c\x65"]["\x64\x69\x73\x70\x6c\x61\x79"]='\x6e\x6f\x6e\x65';
Acronym: 
OPTICAL DIAGNOSTICS
Project ID: 
4 473
Start date: 
01-07-2008
Project Duration: 
54months
Project costs: 
370 000.00€
Technological Area: 
CHEMISTRY, PHYSICAL AND EXACT SCIENCES
Market Area: 
Industrial Equipment and Machinery

Raising the productivity and competitiveness of European businesses through technology. Boosting national economies on the international market, and strengthening the basis for sustainable prosperity and employment.